Apparatus, method, and computer program product for deconvolution analysis

摘要

A deconvolution analysis apparatus includes a sputtering rate calibrating unit that calibrates a depth profile resulting from a depth analysis on a sample to be estimated by using a sputtering surface analysis, according to a depth change of a sputtering rate in an initial sputtering; and a deconvolution analysis unit that performs a deconvolution analysis on the depth profile whose depth axis is extended, so as to make a depth change of a depth resolution in the initial sputtering apparently constant.