DATA MINING TO DETECT PERFORMANCE QUALITY OF TOOLS USED REPETITIVELY IN MANUFACTURING

摘要

A tool with one or more chambers in a manufacturing system is identified as performing at or below an acceptable level by the following steps: Store process data from tools for each one of a plurality of individual processes for a processed object in a process database; Store tool performance data for each individual process for a processed object in a yield database; Develop statistics for similar tool sets associating data with each of the similar tool units; Generate yield numbers for each group of the similar tool units based upon the statistics; and identify poorly/well performing tool units by using the yield numbers.