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Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure
Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure
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机译:检验微观结构的装置,检验微观结构的方法和检验微观结构的程序
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摘要
Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.
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