首页> 外国专利> Liquid droplet ejecting apparatus, liquid droplet ejecting system, electro-optical device, method of manufacturing electro-optical device, method of forming a metal wiring line, and electronic apparatus

Liquid droplet ejecting apparatus, liquid droplet ejecting system, electro-optical device, method of manufacturing electro-optical device, method of forming a metal wiring line, and electronic apparatus

机译:液滴喷射装置,液滴喷射系统,电光装置,电光装置的制造方法,金属配线的形成方法以及电子设备

摘要

A liquid droplet ejecting apparatus including a main body, a work carrying table for supporting a work, an Y-directional movement mechanism for moving the work carrying table in the horizontal direction relative to the main body, a droplet ejecting head for ejecting liquid droplets to the work supported by the work carrying table, and at least one blowing unit for blowing a gas towards the work supported by the work carrying table to dry the liquid droplets ejected to the work, wherein the gas has a condition almost equal to the atmosphere in which the liquid droplet ejecting apparatus is placed.
机译:一种液滴喷射装置,其包括:主体;用于支撑工件的工件承载台;用于使工件承载台相对于主体在水平方向上移动的Y方向移动机构;用于将液滴喷射到主体的液滴喷射头。工件承载台支撑的工件,以及至少一个吹送单元,用于向工件承载台支撑的工件吹送气体,以干燥喷射到工件上的液滴,其中气体的状态几乎等于大气中的气体。放置液滴喷射装置的位置。

著录项

  • 公开/公告号US7384140B2

    专利类型

  • 公开/公告日2008-06-10

    原文格式PDF

  • 申请/专利权人 KENJI KOJIMA;TATSUO YODA;

    申请/专利号US20030739906

  • 发明设计人 KENJI KOJIMA;TATSUO YODA;

    申请日2003-12-18

  • 分类号B41J2/01;

  • 国家 US

  • 入库时间 2022-08-21 20:09:55

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