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Liquid droplet ejecting apparatus, liquid droplet ejecting system, electro-optical device, method of manufacturing electro-optical device, method of forming a metal wiring line, and electronic apparatus
Liquid droplet ejecting apparatus, liquid droplet ejecting system, electro-optical device, method of manufacturing electro-optical device, method of forming a metal wiring line, and electronic apparatus
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机译:液滴喷射装置,液滴喷射系统,电光装置,电光装置的制造方法,金属配线的形成方法以及电子设备
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摘要
A liquid droplet ejecting apparatus including a main body, a work carrying table for supporting a work, an Y-directional movement mechanism for moving the work carrying table in the horizontal direction relative to the main body, a droplet ejecting head for ejecting liquid droplets to the work supported by the work carrying table, and at least one blowing unit for blowing a gas towards the work supported by the work carrying table to dry the liquid droplets ejected to the work, wherein the gas has a condition almost equal to the atmosphere in which the liquid droplet ejecting apparatus is placed.
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