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Sensor arrangement, in particular a micro-mechanical sensor arrangement
Sensor arrangement, in particular a micro-mechanical sensor arrangement
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机译:传感器装置,尤其是微机械传感器装置
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摘要
A sensor array, in particular a micromechanical sensor array, and methods for manufacturing the sensor array are provided, which sensor array includes a sensor section for supplying certain sensor signals, and a cover section provided on the sensor section to form a hermetically sealed sensor interior. An electronic analyzer device is at least partially integratable into cover section for analysis of the sensor signals, and electrically connectable to a corresponding circuit device of the sensor section.
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