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Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces
Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces
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机译:集成工具,带有自动校准系统和可互换的湿处理组件,用于处理微特征工件
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摘要
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
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