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Method and system for increasing product yield by controlling lithography on the basis of electrical speed data
Method and system for increasing product yield by controlling lithography on the basis of electrical speed data
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机译:通过基于电速度数据控制光刻来提高产品产量的方法和系统
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摘要
The electrical performance of sub-devices is detected and the corresponding measurement data is used to control a lithography process so as to compensate for any type of process variations during a manufacturing sequence.
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