METHOD AND APPARATUS FOR GLOW DISCHARGE PLASMA TREATMENT OF POLYMER MATERIALS AT ATMOSPHERIC PRESSURE

摘要

A steady-state glow discharge plasma is generated at one atmosphere ofpressure within the volume (S) between a pair of insulated metal plateelectrodes (14)spaced up to 5 cm apart and rf energized with an rms potential of 1-5kV at 1-100kHz(20). Space between the electrodes is occupied by air, nitrous oxide, and anoble gassuch as helium, neon, argon, etc., or mixtures thereof. The electrodes arechargedby an impedance matching network (31) adjusted to produce the most stable,uniformglow discharge. Also, a method for treating a meltblown polymer web, using theaforementioned plasma device, is included.