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METHOD AND APPARATUS FOR LOCALIZED INFRARED SPECTROSCOPY AND MICRO-TOMOGRAPHY USING A COMBINATION OF THERMAL EXPANSION AND TEMPERATURE CHANGE MEASUREMENTS
METHOD AND APPARATUS FOR LOCALIZED INFRARED SPECTROSCOPY AND MICRO-TOMOGRAPHY USING A COMBINATION OF THERMAL EXPANSION AND TEMPERATURE CHANGE MEASUREMENTS
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机译:热膨胀和温度变化测量相结合的局部红外光谱和显微照相术的方法和装置
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摘要
A method and a system for generating a high spatial resolution multi-dimensional image representing the chemical composition of a sample. Highly localized IR light is used to cause the heating and thermal expansion of the sample. Modulating this IR light will cause diis effect to take place at various depths of the material. The method and system of the present invention are used to generate a chemical profile of the sample using a combination of: (i) measurements of the diermal expansion and temperature change caused by absorbing IR radiation together; and (ii) measurements of die thermal expansion properties and thermal properties (such as diermal diffusivity and conductivity) of sites on the surface of die sample and the material surrounding it.
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