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MINUSCULE SIZE PHTO-SPECTROMETRY

机译:微型尺寸光谱仪

摘要

Device and method for implementing a photo-spectrometer unit, PSU (20), for use with a spectrometry system (100) having optical means (12), and electronic means (13) including detection means (15, 25, 25j) and processing means (16, 26, 26k). The PSU is formed in a first manufacturing process step into a monolithic structure as a chip of substrate material (30) including integrally formed optical means, and has a first input surface (301) separated from a second receiving surface (302) by a substrate material thickness (t). Electronic means are formed onto the PSU structure in a second manufacturing process step. The substrate material is selected as a material transparent to electromagnetic radiations, and the PSU has at least one optical deflecting element (32) configured for guiding received radiations through the thickness of the substrate material, for establishing direct optical path coupling between both an element formed on one surface and an element formed on another surface of the substrate material.
机译:用于实现与具有光学装置(12)以及包括检测装置(15、25、25j)的电子装置(13)的光谱系统(100)一起使用的光谱仪单元PSU(20)的装置和方法表示(16,26,26k)。 PSU在第一制造工艺步骤中形成为整体结构,作为包括一体形成的光学装置的衬底材料(30)的芯片,并且具有通过衬底与第二接收表面(302)分开的第一输入表面(301)。材料厚度(t)。在第二制造工艺步骤中,将电子装置形成在PSU结构上。选择衬底材料作为对电磁辐射透明的材料,并且PSU具有至少一个光偏转元件(32),该光偏转元件被配置为引导接收的辐射穿过衬底材料的厚度,以在形成的两个元件之间建立直接的光路耦合。在衬底材料的一个表面上形成元件并且在衬底材料的另一表面上形成元件。

著录项

  • 公开/公告号WO2007129305A1

    专利类型

  • 公开/公告日2007-11-15

    原文格式PDF

  • 申请/专利权人 MEDINGO LTD.;IDDAN GAVRIEL J.;

    申请/专利号WO2007IL00533

  • 发明设计人 IDDAN GAVRIEL J.;

    申请日2007-05-01

  • 分类号G01J3/02;G01J3/12;G01J3/28;

  • 国家 WO

  • 入库时间 2022-08-21 20:02:01

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