ELECTRODE FOR PLASMA REACTOR VESSEL, AND PLASMA REACTOR VESSEL

摘要

[PROBLEMS] To provide an electrode for plasma reactor vessels, which has improved PM (particle material) removing performance, by starting discharge at a lower voltage, namely, by starting generation of plasma at a lower voltage and making the electrode have a characteristic for providing a higher plasma light emission luminance. [MEANS FOR SOLVING PROBLEMS] An electrode (1) for a plasma reactor vessel is provided with an electrode main body (10), and a surface layer section (11). On the surface layer section, a plurality of high current density layers (112), which cover the electrode main body (10), have oxygen defects and are composed of TiO2, are scattered in the surface direction.