STREAMING-BASED MICRO/MINI CHANNEL ELECTRONIC COOLING TECHNIQUES

摘要

Micro-cooling technology for thermal control in the fabrication and operation of micro- and nano-scale such as high speed, high density micro scale electronic devices, micro sensors and micro machines. Micro /mini heat exchangers and heat pipes have at least one channel through which the streaming flow is passed therethrough. The oscillating flow can be generated by diaphragms, vibrators, electrokinematic force and thermal acoustic force.