Multi-functional cyclic siloxane compound, siloxane-based polymer prepared from the compound and process for preparing dielectric film by using the polymer

摘要

Disclosed herein are a multi-functional cyclic siloxane compound (A), a siloxane-based (co)polymer prepared from the compound (A), or the compound (A) and at least one of Si monomer having organic bridges(B), acyclic alkoxy silane monomer(C), and linear siloxane monomer (D); and a process for preparing a dielectric film using the polymer. The siloxane compound of the present invention is highly reactive, so the polymer prepared from the compound is excellent in mechanical properties, thermal stability and crack resistance, and has low dielectric constant resulting from compatibility with conventional pore-generating materials. Furthermore, low content of carbon and high content of SiO₂ make enhance applicability to the process of semiconductor, therefore, this film is of great use as a dielectric film.