首页> 外国专利> METHOD FOR CHARACTERISING A THIN-FILM DIELECTRIC MATERIAL IN THE FAR-INFRARED FIELD AND DEVICE AND TEST BENCH FOR REALISING SAID METHOD

METHOD FOR CHARACTERISING A THIN-FILM DIELECTRIC MATERIAL IN THE FAR-INFRARED FIELD AND DEVICE AND TEST BENCH FOR REALISING SAID METHOD

机译:在远场和装置中表征薄膜介电材料的方法以及实现所述方法的测试台

摘要

The invention relates to a method and a device for characterising a thin film (2). The device (1) defining a wave guide includes a substrate (10) of a transparent material with parallel faces (100, 101) with a diffraction network (102) on one face (100). A wave parallel network THz is projected on the network (102) at a predetermined incidence angle and the energy transmitted is measured with or without a film (102) on the other face (101). The transmitted energy has minimal values for certain frequencies that differ depending on the film (2) being present or not. The differential analysis of the minimal values with and without the film (2) is used for determining the electromagnetic parameters of the film material.
机译:用于表征薄膜(2)的方法和设备技术领域本发明涉及一种用于表征薄膜(2)的方法和设备。限定波导的装置(1)包括透明材料的基板(10),该基板具有在一个面(100)上具有衍射网络(102)的平行面(100、101)。平行波THz以预定的入射角投射到网络(102)上,并且在另一面(101)上有或没有薄膜(102)的情况下测量所传输的能量。对于某些频率,透射能量具有最小值,该最小值取决于存在的薄膜(2)而不同。在有膜和无膜(2)的情况下,最小值的差异分析用于确定膜材料的电磁参数。

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