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DISPLACEMENT DETECTING METHOD, DISPLACEMENT DETECTING DEVICE AND CALIBRATING METHOD THEREOF, AND RECORDING DEVICE OF INFORMATION RECORDING MEDIUM ORIGINAL DISK

机译:信息记录中原盘的位移检测方法,位移检测装置及其校准方法以及记录装置

摘要

Two light beams are incident on the same position on a surface of an object (105) to be measured obliquely from upper sides facing each other, and positions at which the reflecting light beams are incident on respective predetermined detection surfaces are detected by position detectors (102 and 104) for outputting respectively as position detection signals. The displacement of the surface to be measured is detected by obtaining the difference between or the sum of respective position detection signals so as to cancel the components in the directions opposite to each other out of the components indicating changes from the reference position included in respective position detection signals.
机译:两个光束从彼此相对的上侧倾斜地入射到要测量的物体(105)的表面上的相同位置,并且反射光束入射在各个预定检测表面上的位置由位置检测器检测( 102和104)分别输出作为位置检测信号。通过获取各个位置检测信号之间的差或总和来检测被测表面的位移,以从指示各个位置中包括的基准位置变化的分量中抵消彼此相反方向的分量。检测信号。

著录项

  • 公开/公告号EP1424537A4

    专利类型

  • 公开/公告日2008-03-12

    原文格式PDF

  • 申请/专利权人 MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD;

    申请/专利号EP20020758792

  • 发明设计人 ABE SHINYA;

    申请日2002-08-07

  • 分类号G01B11/00;G01B11/02;G01B11/06;G01B11/24;G01D5/30;G03F7/20;G03F9/00;G11B7/00;G11B7/004;G11B7/26;G11B9/10;H01J37/304;H01L21/027;

  • 国家 EP

  • 入库时间 2022-08-21 19:59:13

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