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Process and apparatus for batch and continuous densification by chemical vapor infiltration (CVI)
Process and apparatus for batch and continuous densification by chemical vapor infiltration (CVI)
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机译:通过化学气相渗透(CVI)进行批量和连续致密化的方法和设备
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摘要
A CVI furnace is described in which single layer of a porous material or multiple layers of porous materials stacked in a module are loaded into a furnace. The modules are loaded into the furnace singularly or as multiple units stacked vertically or side by side. The modules can be moved through the furnace continuously or step-wise. The furnace comprises a separate CVI chamber. The porous material is heated and subjected to densification, thereby ensuring a dispersion of the reactant gas onto the porous material. A process of densifying a sheet of porous material is also described.
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