PRODUCING AN ARRAY OF NANOSCALE STRUCTURES ON A SUBSTRATE SURFACE VIA A SELF-ASSEMBLED TEMPLATE

摘要

Method for producing an array of nanoscale structures on a substrate surface, via a self-assembled template. Providing self-assembled template 10 whose surface includes array 12 of nanoscale features 14 spontaneously formed by treating 16 crystal surface 18; applying 20 material(s) upon array 12 of nanoscale features 14, for replicating array 12 of nanoscale features 14, such that the applied material(s) includes a replica configuration and shape of array 12 of nanoscale features 14; treating 22 the applied material(s) while maintaining replica configuration and shape thereof, for forming treated applied material(s) having the replica configuration and shape; contacting 24 the replica configuration and shape of treated applied material(s), with the substrate surface 26, for forming a combination structure having the replica configuration and shape in contact with substrate surface 26; and processing the combination structure, for generating 28 array 30 of nanoscale structures 32 on substrate surface 26 of substrate 34.