METHOD OF FORMING WAVEGUIDES VIA CONTROLLED DELAMINATION AND WAVEGUIDES FORMED USING THE METHOD

摘要

A method of forming a waveguide is disclosed, as well as the waveguide itself. A multilayer stack of light guiding layers is formed, and the multilayer stack is delaminated between light guiding layers to form a waveguide between the light guiding layers. The multilayer stack is delaminated in a patterned region between light guiding layers. Here a new approach is described, wherein hollow microchannels forming a Bragg waveguide assembly are fabricated by controlled formation of thin film delamination buckles within a multilayer stack. A hollow waveguide is formed by alternating layers of the multilayer stack forming light guiding surfaces. The hollow waveguide is formed between layers that delaminate from each other, as for example under applied stress to one or more of the layers. The multi-layer stack may be formed of alternating layers of low and high index of refraction materials, as for example forming omni-directional dielectric reflectors. Metal cladding of the waveguiding layers is also provided in one embodiment, as for example by providing a metal base layer and a cap layer. Methods of assembly are disclosed, as well as the assemblies themselves.