Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method of a microelectromechanical gyroscope

摘要

A microelectromechanical gyroscope includes: a microstructure (102) having a first mass (107), which can oscillate according to a first axis (X), and a second mass (108), constrained to the first mass (107) so as to oscillate according to a second axis (Y) in response to a rotation (Ω) of the microstructure (102); and a driving device (103), coupled to the microstructure (102) to maintain the first mass (107) in oscillation at a resonance frequency (ωR). The driving device (103) is provided with a low-pass filter, (114) having a passband (PB) such that the resonance frequency (ωR) is comprised in the passband (PB), and a disturbance frequency (ωD) associated to disturbance signals (IADD(t), VAO(t)) due to coupling between the first mass (107) and the second mass (108) is not comprised in the passband (PB).