CAPACITANCE TYPE DISPLACEMENT GAUGE AND METHOD FOR MEASURING DEFORMATION OF A SPECIMEN USING THE SAME

摘要

The present invention, relates to a method of measuring strain gauge and capacitive displacement using the same specimen, specimen , in particular, as in MEMS (Micro Electro-Mechanical Systems) can measure the variation of the thickness of the test piece used in the micrometer field device, has a high speed, also, provides the linearity of the measurements improved capacitance-type strain gauge that is that a technical problem. For ; this end, the present invention provides a capacitance type displacement gauge to measure the deformation of the specimen due to the applied load. Capacitance-type displacement gauge according to the present invention comprises a frame; The first and the second grip, which is installed on the frame to support the specimen; And a second and a third electrode facing the first electrode and the first electrode, the facing area and thus the capacitance of the second and the third electrode to the first electrode relative to the deformation of the specimen increased or decreased by an electrode unit.