A temperature control device for a glass substrate which requires a pattern formation process is provided to minimize the contraction or expansion of a pattern in a pattern formation process for a glass substrate by touching both of the front and back surfaces of the glass substrate with temperature-regulating air at the same time so that the whole area of the glass substrate can be uniformly controlled at a pattern formation process temperature. A temperature control device consists of a glass substrate(30), a clean room(40), a temperature-regulating air guide plate(50), an air current creation plate(60), and an air conditioner(70). The clean room(40) comprises lift pins(41) at which the glass substrate(30) is place. The temperature-regulating air guide plate(50) guides temperature-regulating air so as to be discharged to the front surface of the glass substrate(30) through a plurality of floating hollows(51). The air current creation plate(60) guides the temperature-regulating air, which has been discharged through the floating hollows(51) and has touched the front surface of the glass substrate(30), so as to touch the rear surface of the glass substrate(30). The air conditioner(70), cyclically controlling temperature-regulating air at a pattern formation process temperature, comprises a supply duct(71) to supply temperature-regulating air to the temperature-regulating air guide plate(50) and a return duct(72) to discharge the temperature-regulating air touched to the rear surface of the glass substrate(30).
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