PERPENDICULAR TYPE PROBE FOR TEST OF SEMICONDUCTOR, PROBE CARD WITH THE PROBES AND METHODS FOR MANUFACTURING THE PROBE CARD

摘要

A vertical probe for inspecting a semiconductor is provided to shorten an interval of semiconductor inspection time by inspecting a semiconductor chip with an irregular two-dimensional pad arrangement at a time. A vertical probe(300) includes a front end part(310) in contact with a pad of a semiconductor chip in operation and a support part(320) that supports the front end part and gives elasticity to the front end part. The support part is made of at least one support piece. The support part can be fixed to a fixing part(330) fixed to a ceramic substrate. The front end part can include a coupling part connected to the support part and a contact part incorporated with the coupling part wherein the contact part comes in contact with the pad of the semiconductor chip in operation. The contact part can come in line-contact with the pad of the semiconductor chip.