OPTICAL SYSTEM FOR PROBING TESTER AND PROBING METHOD USING THE SAME

摘要

An optical system for a probing tester and a probing method using the same are provided to more precisely and easily position a mark image on an optical axis of a first imaging device. An optical system for a probing tester includes a first imaging device(100) and a second imaging device(200). The first imaging device includes a reference mark(120), a first lens unit, a beam splitter, and a first camera. The first lens unit forms a mark image for the reference mark at a first reference position(a) in a desired size. The beam splitter passes light of a lens unit direction from the reference mark and reflects light of an opposite direction. The first camera picks up the mark image recognized by being reflected from the beam splitter. The second imaging device includes a second lens unit and a second camera. The second lens unit forms an image for the mark image at a second reference position(b) in a desired size. The second camera picks up the image formed at the second reference position.