VAPORIZER AND METHOD OF VAPORIZING AND CLEANING METHOD OF VAPORIZER HAVING HIGH EVAPORATING EFFICIENCY USING PLASMA

摘要

A vaporizer, a vaporizing method, and a method for cleaning the vaporizer are provided to maximize operation efficiency of the vaporizer by generating plasma inside the vaporizer. A vaporizing unit(124) includes a source portion(100), a valve(110), and a vaporizer(120). A liquid source is contained in the source portion. The valve adjusts a flow rate of the liquid source in the source portion. The liquid source is vaporized, such that the liquid source is turned into a gas source in the source portion. The vaporizer sprays the gas source toward a wafer, such that a thin film is formed on the wafer. The vaporizer is composed of discharge cells, such that the vaporizer is discharged. The vaporizer includes a cylindrical ceramic vaporizer tube and an induction coil. A coil is wound around a tube-like vaporizer, such that the vaporizer generates plasma.