ELECTRICAL LIFETIME IMPROVEMENT OF AL DOPED ZNO THIN FILMS BY ELECTROLYSIS PROCESS

摘要

A method for manufacturing an Al-doped ZnO thin film is provided to prevent electrical conductivity of the ZnO thin film by enhancing an anti-oxidation property. A metal aluminum or a metal gallium is added into a ZnO transparent thin film(2) by using a physical deposition process. The ZnO transparent thin film is submerged into an electrolysis tub(3), in which electrolysis solution(4) containing H2O is filled. Electrolysis is performed, such that hydrogen ions are physically attached to the ZnO transparent thin film. During the electrolysis process, a metal electrode(1) is used as an anode and the ZnO transparent thin film is used as a cathode.