INDUCTIVELY COUPLED PLASMA SOURCE HAVING MULTI DISCHARGING TUBE COUPLED WITH MAGNETIC CORE

摘要

An inductively coupled plasma source having a multi discharging tube coupled with a magnetic core is provided to supply large area plasma uniformly and widely by using a repetitive extension structure. A transformer has a magnetic core(31) and a primary winding(32). A number of plasma discharge tubes(20) are coupled in order for the magnetic core to penetrate through a center part and are separated to have each independent discharge space. A core protection tube(23) surrounds the magnetic core part penetrating through the plasma discharge tube. A power supply source(33) is electrically connected to the primary winding. A current of the primary winding is driven by the power supply source, and the driving current of the primary winding induces an AC potential in the plasma discharge tube forming inductively coupled plasma completing a secondary circuit of the transformer. The inductively coupled plasma is formed in the plasma discharge tube to surround the outside of the core protection tube.