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LARGE SCALE TRANSPARENT CONDUCTING FILM MANUFACTURING METHOD AND SYSTEM BY ELLIPTICAL ORBIT ELECTRON CYCLOTRON RESONANCE HAVING LINEAR MICROWAVE
LARGE SCALE TRANSPARENT CONDUCTING FILM MANUFACTURING METHOD AND SYSTEM BY ELLIPTICAL ORBIT ELECTRON CYCLOTRON RESONANCE HAVING LINEAR MICROWAVE
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机译:具有线性微波的椭圆轨道电子回旋共振的大规模透明导电薄膜制造方法和系统
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摘要
A system and a method for manufacturing a large scale transparent conducting film by an elliptical orbit electron cyclotron resonance having a linear microwave are provided to generate a uniform electromagnetic field ranging within a film width by a linear microwave induction and an elliptical electromagnet. A method for manufacturing a large scale transparent conducting film by an elliptical orbit electron cyclotron resonance having a linear microwave includes the steps of: maintaining a room temperature and a vacuum state in a chamber and transferring a film to be coated via a main drum(10); generating a high density of plasma ions ranging within a large scale by an elliptical orbit electron cyclotron resonance along an electromagnetic field in condition that a microwave and a magnetic field has the same wavelength by a magnetic field of an elliptical shape generated from a rectangular electromagnet of a donut shape and a linear microwave; and forming a transparent metal oxide layer having transparent conductivity on a film in a room temperature condition using a roll to roll method by dissolving a metal ion source provided from a double ejection ring.
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