A PULSE PLASMA ELECTRON DENSITY AND ELECTRON TEMPERATURE MONITORING DEVICE AND METHOD THEREOF

摘要

An apparatus and a method for monitoring pulse plasma electron density and electron temperature are provided to simplify a measuring process and a monitoring process by using a natural frequency detection method. A trigger signal output unit outputs a trigger signal. An electromagnetic wave generator(300) transmits electromagnetic waves of a successive frequency band. An electromagnetic wave transceiver(200) is contacted with pulse plasma within a pulse plasma reaction receptacle(100) so that a frequency of the transmitting electromagnetic wave has a mutual relation to pulse plasma electron density and electron temperature. A frequency analyzer(400) is electrically connected to the electromagnetic wave transceiver in order to be synchronized with the trigger signal of the trigger signal output unit. A computer(500) is electrically connected to the electromagnetic wave generator in order to analyze the electron temperature and the electron density by extracting a cutoff frequency. The electromagnetic wave generator and the frequency analyzer are used for determining the cutoff frequency when a pulse of the pulse plasma is equal to or more than 200Hz. A network analyzer is used for determining the frequency according to the time variation when the pulse of the pulse plasma is equal to or less than 200Hz.