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APPARATUS FOR APPLYING SOLUTION AND METHOD OF MEASURING QUANTITY OF SOLUTION
APPARATUS FOR APPLYING SOLUTION AND METHOD OF MEASURING QUANTITY OF SOLUTION
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机译:应用解决方案的装置和解决方案的数量的测量方法
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摘要
The invention is to provide an apparatus for applying a solution, in which the precision when the amount of the solution to be supplied from a nozzle is measured can be improved and the efficiency when the measuring work is done can also be improved. The apparatus for applying the solution onto a substrate is provided with: a plurality of application heads 22 which are arranged along the predetermined direction and each of which has the nozzle for applying the solution onto the substrate; a placing table 7 on the upper surface of which the substrate is placed; a first linear motor 8 for relatively moving the placing table and the plurality of application heads to the direction crossing the predetermined direction; a scale 41 for measuring the weight of the solution to be supplied from the plurality of application heads; and a second linear motor 44 for moving the scale independently of the placing table to the predetermined direction or the direction crossing the predetermined direction.
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