Substrate temperature measuring instrument with substrate heating method and heat treatment device - heats substrate by light, uses thermocouple with cover partly of high heat- and partly of high light-conductivity materials

摘要

The instrument has a device for heating a substrate by light application and is composed of a thermocouple and a covering member over the thermocouple. The part of the covering member which covers temperature measuring part is made of a high heat-conductivity material. The part other than the part made of the high heat-conductivity material is made of high light-reflectivity material.