Radiation source for producing extreme ultraviolet radiation, has two internal electrode plates firmly connected by isolation layer, and two external electrode plates arranged torque proof on both sides internal electrode

摘要

The source (1) has two external electrode plates (341,342) are arranged torque proof on both sides the internal electrode plates, whereby one part of one of the external electrode plates is adjusted toward the axis of rotation (334) such that in a position the part of the internal electrode plates (331,332) surrounding the unloading unit in the optical axis (2) between the external electrode plates is locked and electrically contacted. The internal electrode plates turn to change the unloading unit for further releasing the unloading units (31,32). The two internal electrode plates are firmly connected by an isolation layer (333), stored in a rotating manner, and has electrically conducting area according to the number of unloading units. The two internal electrode plates arrange multiple anodes (311) and cathodes (312). An independent claim is also included for the arrangement that has electrode plates equipped with multiple of unloading units forming a compact gun wheel.