首页> 外国专利> Device for applying coating on surface of workpiece, comprises plasma generator for producing plasma in a plasma chamber, arrangement for producing gas flow through plasma chamber, and device for supplying and inserting coating material

Device for applying coating on surface of workpiece, comprises plasma generator for producing plasma in a plasma chamber, arrangement for producing gas flow through plasma chamber, and device for supplying and inserting coating material

机译:用于在工件表面上施加涂层的装置,包括用于在等离子体室中产生等离子体的等离子体发生器,用于产生通过等离子体室的气流的装置以及用于供应和插入涂层材料的装置

摘要

The device for applying a coating on a surface of workpiece, comprises a plasma generator for producing plasma in a plasma chamber (13), an arrangement for producing gas flow through the plasma chamber, device for supplying and introducing a coating material into the gas flow downstream of the plasma chamber, and a nozzle for directing the coating material on the surface. The plasma chamber flows into a plasma channel (14). The device and the workpiece are arranged in a vacuum coating chamber (1). The plasma exists in an arc between a cathode (5) and an anode (6). The device for applying a coating on a surface of workpiece, comprises a plasma generator for producing plasma in a plasma chamber (13), an arrangement for producing gas flow through the plasma chamber, device for supplying and introducing a coating material into the gas flow downstream of the plasma chamber, and a nozzle for directing the coating material on the surface. The plasma chamber flows into a plasma channel (14). The device and the workpiece are arranged in a vacuum coating chamber (1). The plasma exists in an arc between a cathode (5) and an anode (6). The device contains a supply channel for coating material, which flows into the plasma channel. The coating material in the plasma channel exists an evaporating temperature. The plasma channel has a length of 2-10 cm. A supply channel for a reaction material flows into the plasma channel. The nozzle forms a space for an open jet with the coating material in an opening angle of 30-50[deg]. The cross-sectional shape of the nozzle is aligned to the outer shape of the workpiece. A supply channel for an additive flows into the nozzle. The coating material is intermittently supplied to the surface.
机译:用于在工件的表面上施加涂层的装置包括:用于在等离子体室(13)中产生等离子体的等离子体发生器;用于产生通过等离子体室的气流的装置;用于将涂层材料供应和引入到气流中的装置等离子体室的下游,以及用于将涂层材料引导到表面上的喷嘴。等离子体室流入等离子体通道(14)。装置和工件布置在真空镀膜室(1)中。等离子体以弧形存在于阴极(5)和阳极(6)之间。用于在工件的表面上施加涂层的装置包括:用于在等离子体室(13)中产生等离子体的等离子体发生器;用于产生通过等离子体室的气流的装置;用于将涂层材料供应和引入到气流中的装置等离子体室的下游,以及用于将涂层材料引导到表面上的喷嘴。等离子体室流入等离子体通道(14)。装置和工件布置在真空镀膜室(1)中。等离子体以弧形存在于阴极(5)和阳极(6)之间。该设备包含用于涂料的供应通道,该涂料通道流入等离子通道。等离子体通道中的涂层材料存在蒸发温度。等离子体通道的长度为2-10厘米。反应材料的供应通道流入等离子体通道。喷嘴以30-50°的打开角度形成用于带有涂层材料的开放射流的空间。喷嘴的截面形状与工件的外形对齐。添加剂的供应通道流入喷嘴。涂料被间歇地供应到表面。

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