Sensor in a micromechanical construction for measuring mass flow according to the coriolis - principle

摘要

The invention relates to a sensor (11) in a micromechanical construction for measuring a mass flow rate and according to the coriolis - principle. For this purpose, two conductor sections (13), in a suspension means (24) mounted, as a result of which they can be excited to oscillate in phase opposition (essential for the measurement principle). According to the invention, it is provided that between the line sections (13) of the layers forming (12a, 12b) a spacer layer (18) is provided, which is at a distance between the line sections (13) in the rest state ensures. In this way, an antiphase oscillation of the line sections only possible at all, since this results in a collision of the approaching line sections (13) is prevented.