Inertial sensor component for e.g. linear acceleration sensor, has stop unit connected with substrate and limiting movement of seismic mass in moving direction, where stop area of seismic mass is provided in elastic manner

摘要

The component (10) has a seismic mass (30) movable opposite to a substrate (20) by a spring element (21). A stop unit (25) is connected with the substrate and limits the movement of the seismic mass in a moving direction (50), where a contact of the stop unit is provided with a stop area (35) of the seismic mass in case of large movement of the seismic mass in the moving direction. The stop area of the seismic mass is provided in an elastic manner. The substrate, the seismic mass, the stop area and the stop unit are made of a semiconductor material e.g. silicon material.