Electrostatic actuator for nomadic product i.e. wrist watch, has fixed and movable frames provided in upper layer of plate, where each frame has stems with branches that carry interdigited finger bars, and substrate opened under branches

摘要

The actuator (10) has fixed and movable frames (24, 26) provided in an upper layer (18) of a silicon on insulator type plate (14) and displaced along a longitudinal direction (A1) parallel to a plane of a substrate (20). The frame (26) is returned to a rest position by elastic return elements (28, 30), where a displacement of the frame (26) is caused by a potential difference (V) applied between the frames. Each frame has longitudinal lateral and central stems (36, 38, 32) with transversal branches (34, 40) that carry interdigited finger bars (12). The substrate is opened under the branches.