Optical projection system for UV radiation, has multiple lenses, for projection of object level in image level, where lenses include slightly conductive surface and objective housing electrically contacting lens at conductive surface

摘要

The system has an objective housing (48) filled with purge gas, an objective (60) arranged in the housing, where the objective comprises lenses (61) for the projection of an object level in an image level. A reticle (R) and a wafer (W) are arranged in the object level and in the image level, respectively. The lenses include slightly conductive surface, where the objective housing electrically contacts the lenses at the conductive surface. The conductive surface is predominantly formed by the lens material and has different ions.