Turbomachine i.e. turbo-molecular pump, has bearing part of safety bearing made of metal, and bearing surface of bearing part provided with surface coating, which is applied using chemical vapor deposition/physical vapor deposition method

摘要

The turbomachine (10) has a safety bearings (22, 23) i.e. sliding bearing, and a magnetic bearings (20, 21), where the safety bearings are formed as lubricant-free bearings. A bearing part (14) of the safety bearing is made of metal, and a bearing surface of the bearing part has a surface coating, which is applied using a chemical vapor deposition/physical vapor deposition method. The surface coating is a diamond-like carbon layer. The metal-bearing part is made of steel.