Acceleration sensor, has seismic mass suspended on curved springs over substrate, where springs have two bending beams, which are connected by bars, and springs and mass are connected by projections

摘要

The sensor has a seismic mass (1) suspended on curved springs (2) over a substrate e.g. silicon substrate. The mass is moved perpendicular to a surface of the substrate. The springs have two bending beams (6, 8), which are connected by bars (7, 9), where the bending beams have a constant thickness. The springs and the mass are formed in a one-piece. The bars are arranged between the beams in a spaced manner. The springs and the mass are connected by projections (3).