Semiconductor detector arrangement for use as back-illuminated multipin-photo detectors or charge coupled devices sensors, has multiple regions of semiconductor substrate spatial assigned to semiconductor structures

摘要

The semiconductor detector arrangement (15) has multiple semiconductor structures, particularly photodiodes arranged on the front side of the substrate. The structures are connected with the support layer by electric contact and form multiple detectors (14) together with the substrate. Multiple regions of the semiconductor substrate are spatial assigned to semiconductor structures, and are separated partially from each other by separating grooves (16), so that charge carriers are prevented to reach from a region to another region of the substrate. An independent claim is also included for a manufacturing method for a semiconductor detector arrangement.