Method for interference distance measurement of object, involves guiding radiation emitted by radiation sources over transparent substrate and radiation is guided by partial silvering on its rear side in measuring beam and reference beam

摘要

The method involves guiding radiation (6) emitted by a radiation source (5) over a transparent substrate. The radiation is guided by a partial silvering on its rear side in a measuring beam (8) and a reference beam (9). The measuring beam is reflected on the object to be measured and the reference beam is reflected on the partial silvering. The reference beam is guided by multiple reflections on or in the substrate depending on the distance position of the object from the substrate and depending on the thickness of the substrates. An independent claim is also included for a device for interference distance measurement of objects.