Composite body manufacturing method for use in area of immersion lithography, involves treating contact surfaces, such that contact surfaces are free from mono-layered or multi-layered layer of water molecules

摘要

The method involves providing two components (1, 2) with respective contact surfaces provided for connection. The contact surfaces are treated in such a manner that the contact surfaces are free from a mono-layered or multi-layered layer of water molecules. The contact surfaces are brought together for optical contacting of the component (1) e.g. optical unit, to the component (2) to manufacture a composite body from the two components. The component (1) has calcium fluoride crystal, lutetium-aluminum garnet-crystal, quartz glass, polycrystalline-spinel or spinel-ceramic. Independent claims are also included for the following: (1) a contacting device for implementing dry contacting of bodies (2) a composite body having two bodies.