Apparatus and method for the automatic detection of erroneous measurements, by means of quality factors

摘要

It is a device (1) for the automatic detection of a possible faulty measurement is disclosed, in which the device (1) at least one incident light - illumination device (14) and / or a transmitted light - illumination device (6) as well as at least one imaging optics (9) and a detector (11) of a camera (10) for mapping of structures (3) on a substrate (2), wherein a first program part (17) with the detector (11) of the camera (10) which is connected for the determination of the position and / or the dimensions of the structure (3) on the substrate (2) is provided, wherein the device (1) a plurality of measured variables m_j, jε {1,.., l} is determined and, resulting in a quantity g can be determined, wherein with the detector (11) of the camera (10) a second program part (18) which is connected an analysis of the measured variables m_j with regard to a possible faulty measurement calculated. It is also a process for the automatic detection of a possible faulty measurement, wherein a analysis of the measured quantity m_j with regard to a possible faulty measurement with a second program part (18) is calculated, which with the detector (11) of the camera (10) is connected.