Reflector for illumination device of extreme ultraviolet projection illumination system, has cooling device integrated into reflector, and sealing rings for gas and liquid-tight sealing arranged between pipe connections and support

摘要

The reflector (4) has a reflector support (9) comprising a reflector surface (10) and a cooling device integrated into the reflector. The reflector support is made from crystalline material and provided with pipe connections from metallic material for connecting a cooling channel with an inlet (15) and an outlet (16) of the cooling medium. Sealing rings for gas and liquid-tight sealing is arranged between the pipe connections and the reflector support, where the pipe connections comprise an external thread that is screwed into threaded holes in the reflector support.