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Projected cardanic drive

机译:预计万向传动

摘要

A projected gimbal point drive system is disclosed. The projected gimbal point drive system includes a spindle (412) capable of apply a torque, and having a concave spherical surface formed on its lower portion. Further included is a wafer carrier disposed partially within the lower portion of the spindle (412). The wafer carrier (422) has a convex spherical surface (420) formed on a surface opposite the concave spherical surface (424) of the spindle. In addition, a drive cup is included that is disposed between the spindle and the wafer carrier. The drive cup (428) has a concave inner surface (430) and a convex outer surface (432), and allows the wafer carrier (422) to be tilted about a predefined gimbal point (418). In this manner, torque can be applied without affecting the gimbal action.
机译:公开了一种投影万向架点驱动系统。投射式万向架点驱动系统包括能够施加扭矩并且在其下部上形成有凹入球形表面的主轴(412)。还包括部分地布置在主轴(412)的下部内的晶片载体。晶片载体(422)具有形成在与主轴的凹入球面(424)相对的面上的凸出球面(420)。另外,包括驱动杯,该驱动杯设置在主轴和晶片载体之间。驱动杯(428)具有凹入的内表面(430)和凸出的外表面(432),并且允许晶片载体(422)围绕预定的万向点(418)倾斜。以这种方式,可以施加扭矩而不会影响万向架的作用。

著录项

  • 公开/公告号DE60127181T2

    专利类型

  • 公开/公告日2007-11-15

    原文格式PDF

  • 申请/专利权人

    申请/专利号DE2001627181T

  • 发明设计人

    申请日2001-06-29

  • 分类号B24B37/04;B24B41/047;B24B47/10;

  • 国家 DE

  • 入库时间 2022-08-21 19:48:31

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