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Fiber optic probe and nearfield optical scanning microscope

机译:光纤探头和近场光学扫描显微镜

摘要

An optical waveguide probe is disclosed which is used for a scanning near-field optical microscope, has a low light propagation loss, and is capable of performing an AFM operation, and a manufacturing method thereof is disclosed. The vicinity of the tip of an optical waveguide 2 is bent toward a side of a probe portion 9 through a plurality of surfaces symmetrical with respect to a plane including an optical axis of the optical waveguide 2. By this, a loss of a propagated light 7 at a bent portion 10 is reduced, and the propagated light 7 can be condensed to a minute aperture 5, so that near-field light can be efficiently emitted from the minute aperture 5. IMAGE IMAGE IMAGE IMAGE
机译:公开了一种用于扫描近场光学显微镜,具有低的光传播损耗并且能够执行AFM操作的光波导探针,并且公开了其制造方法。光波导2的尖端附近通过相对于包括光波导2的光轴的平面对称的多个表面朝向探针部9的一侧弯曲。由此,传播的光的损失如图7所示,减小了弯曲部分10处的图7中的光,并且可以将传播的光7会聚到微小孔5,从而可以从微小孔5有效地发射近场光。 >

著录项

  • 公开/公告号DE60127598T2

    专利类型

  • 公开/公告日2007-12-20

    原文格式PDF

  • 申请/专利权人 SEIKO INSTRUMENTS INC.;

    申请/专利号DE20016027598T

  • 发明设计人

    申请日2001-04-17

  • 分类号G02B21;G12B21/06;G12B21/02;

  • 国家 DE

  • 入库时间 2022-08-21 19:48:27

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