An optical profilometer with a dual type technology (confocally and interferrometrisch) for examining and three-dimensional measurement of surfaces

摘要

The invention relates to a dual technology (confocal and intererometric) optical profilometer for the inspection and three-dimensional measurement of surfaces. The invention comprises: a light source (LED), beam splitters (at least one of which is polarising), means for generating light patterns (LCoS microdisplay), and interchangeable microscopic lenses in the form of standard lenses with which confocal images can be obtained and interferometric lenses with which interferometric images can be obtained. According to the invention, the microdisplay can generate a sequence of light patterns in order to obtain confocal images or a total aperture of all of the light pixels in order to obtain interferometric images. The inventive profilometer is of compact design, which enables the fast and contactless measuring of the form and texture of any type of surface in the micro- and nanometric scale, including structured or stratified samples containing different materials.