Scalar robot for supporting a flat plate-like objects and system for processing flat plate-shaped objects

摘要

A scalar type robot, comprising an arm body (14) having one end part connected to a base part (11) rotatably in a horizontal plane and allowed to extend and retract horizontally, wrist parts (15a) and (15b) connected to the other end part of the arm body rotatably in a horizontal plane and having finger parts (16a) and (16b) for holding a flat plate-like object (7) fixed thereto, and a drive means for the arm body and the wrist parts, wherein the drive means can rotate a rotating part for connecting the wrist parts to the arm body, a rotating part for extending and retracting the arm body, and a rotating part for connecting the arm body to the base part independently of each other, can rotate at least one of these rotating parts by one or more rotations, and is provided with stoppers (21a, 21b) for limiting the rotation of the rotating part capable of being rotated by one or more rotations to a specified rotational angle of one or more rotations so that the finger parts holding the flat plate-like object can be moved along a plurality of generally horizontal generally linear routes, whereby the finger parts fixed to the wrist parts and holding the flat plate-like object can be moved generally in vertical direction relative to the front inlet face of objective equipment, and wires and pipes in a body and an arm are prevented from being twisted off by an excessive rotation.