HALF-LEADER MANAGERS, STRUCTURE FOR THE EVALUATION OF HALF-LEADING VESSELS AND METHOD OF STORAGE AND STORAGE OF HALLER VESSELS

摘要

There is provided an automatically controllable or a robot-oriented container exclusively used for containing wafers. There is also provided a wafer containing structure to prevent damage or breakage of semiconductor wafer due to impact and to prevent static electricity generated thereon due to friction. The present semiconductor wafer container comprises a container main body provided with a cylindrical portion in which a plurality of semiconductor wafers and spacer sheets are stacked and contained, and a lid body to be put on the container main body. In the present semiconductor structure of semiconductor wafers in which a plurality of semiconductor wafers are contained in a container main body through spacer sheets. IMAGE