MICROSYSTEM, ESPECIALLY MICROGYROMETER, WITH AT LEAST TWO OSCILLATING MASSESM MECHANICALLY COUPLED

摘要

Microgyrometer (1) implemented in a planar substrate has at least two oscillating masses (2a, 2b) connected to the substrate by elastic suspension means (3a, 3b) and means for the coupling the two adjacent oscillating masses in order to produce an opposing phase movement of the two masses, during their excitation along a predetermined excitation direction (0x).