Reactive spraying method for coating substrate, e.g. with titanium oxynitride, includes introducing reactive gas into spray chamber at flow rate determined by cyclic control signal

摘要

In a method for coating a substrate by reactive spraying of a metal source, where a plasma forming gas and first and second reactive gases are introduced into the spray chamber under the action of flow control signals, at least the first reactive gas is introduced at a flow rate corresponding to a cyclic control signal. Independent claims are included for (1) apparatus for carrying out the process, comprising an injector for each of the plasma forming gas and first and second reactive gases; a controller for generating opening-closing signals for each of the injectors; and a regulator for introducing the first reactive gas at a flow rate corresponding to a cyclic control signal; and (2) a titanium oxynitride-based coating, having a chemical composition distributed around compounds of formula TixOyNz (I). x : 0.4(y)2 - 0.6y + 0.5; z : (z)2 + 0.2z + 0.3; x : 0.32-0.50.